F00100 - SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components StdTpc-XML Substrates with an edge length

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1)

skillfully used by an experienced operator

注意：　本文書は、2006年、全面的に書き換えられた。

n- and p-type gallium arsenide

F00100 - SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components StdTpc-XML Substrates with an edge lengthThis Specification defines the leak testing requirements and leakage rates for high purity gas piping systems and components used in semiconductor manufacturing. It is also intended as an aid in the procurement and installation of equipment, materials, and services. This Specification applies to high purity gas piping systems and components used in semiconductor manufacturing facilities and comparable research and development areas. It includes