S01600 - SEMI S16 - 半導體製造設備壽命終了階段減少環境衝擊的設計基準 Lang-Japanese この文書の目的は，(1) 10/0

この文書の目的は，(1) 10/0

This Document provides recommendations for addressing the problem of damage through closer examination of electric field as a supplement to existing static charge mitigation techniques

This Test Method is suitable for use in research and development

and the environment) associated with the equipment

S01600 - SEMI S16 - 半導體製造設備壽命終了階段減少環境衝擊的設計基準 Lang-Japanese この文書の目的は，(1) 10/02006112120072www. semi. org320006 2007 SME SME SME Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S12 Guidelines for Equipment Decontamination SEMI S13 Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment