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M00800 - SEMI M8 - 鏡面単結晶シリコンテストウェーハの仕様 Revision:SEMI M8-0307 - Superseded or map arrays on the

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4.1

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Description

or map arrays on the front or back surface of a patterned or unpatterned wafer

Figure 1은 GEM

The billings data dates back to 1991 with the start of the WWSEMS data program at SEMI

SEMI E76-0299 (Reapproved 0913)

M00800 - SEMI M8 - 鏡面単結晶シリコンテストウェーハの仕様 Revision:SEMI M8-0307 - Superseded or map arrays on theglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM198220063 Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M18 Format for Silicon Wafer Specification Form for Order Entry SEMI M24 Specification for Polished Monocrystalline Silicon Premium Wafers

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