P03100 - SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter StdTpc-Chemical & Gas Testing • Mechanical connectors

• Mechanical connectors

The order of the data items may be restricted by an application document

SEMI E99-0200 (first published)

This Test Method is intended for use on silicon substrates and epitaxial layers

P03100 - SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter StdTpc-Chemical & Gas Testing • Mechanical connectorsThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011; originally published September 1997; previously published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not